Brand: TESTEQ
Model: TESTEQ1036
Price: USD 100000 / pcs
Min. Order: 1 pcs
thermal vacuum chamber
tvac chamber
thermal vacuum chamber testing
TESTEQ Thermal Vacuum Cleaning System for High-Precision Semiconductor Components

Industry-Leading Contamination Removal for Lithography, Optics & Wafer Processing

This equipment adopts an innovative inclined sealing structure (patented design-Thermal Vacuum/Lithography/UHV). 

Through the gravity-adaptive cover plate and double-ring sealing ring interlocking technology, it can maintain a stable vacuum level (≤10⁻⁶ Pa), solving the problem of reduced cleaning efficiency caused by sealing failure in traditional equipment. 

It integrates a dual-fluid spray system (sodium hydroxide + deionized water), supporting non-destructive cleaning in a high-temperature (350℃) vacuum environment, avoiding thermal stress deformation.

 It is suitable for the maintenance of high-precision components such as mask plates, lens groups, and vacuum pump components of lithography machines, significantly improving chip yield and equipment lifespan.If you need more information about the models of our testing equipment. Please contact me.https://www.chamber-testing.com/a/d/Thermal-Vacuum-Cleaning-System.html